JPS5763408A - Flatness detector - Google Patents

Flatness detector

Info

Publication number
JPS5763408A
JPS5763408A JP13772780A JP13772780A JPS5763408A JP S5763408 A JPS5763408 A JP S5763408A JP 13772780 A JP13772780 A JP 13772780A JP 13772780 A JP13772780 A JP 13772780A JP S5763408 A JPS5763408 A JP S5763408A
Authority
JP
Japan
Prior art keywords
wafer
flat glass
interference
over
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13772780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632324B2 (en]
Inventor
Yukio Kenbo
Nobuyuki Akiyama
Yasuo Nakagawa
Kazushi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13772780A priority Critical patent/JPS5763408A/ja
Publication of JPS5763408A publication Critical patent/JPS5763408A/ja
Publication of JPS632324B2 publication Critical patent/JPS632324B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13772780A 1980-10-03 1980-10-03 Flatness detector Granted JPS5763408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13772780A JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Publications (2)

Publication Number Publication Date
JPS5763408A true JPS5763408A (en) 1982-04-16
JPS632324B2 JPS632324B2 (en]) 1988-01-18

Family

ID=15205409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13772780A Granted JPS5763408A (en) 1980-10-03 1980-10-03 Flatness detector

Country Status (1)

Country Link
JP (1) JPS5763408A (en])

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225904A (ja) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン 透明物体表面と他表面との微小間隔の画像を形成する方法および装置
CN104567748A (zh) * 2013-10-14 2015-04-29 上海金艺检测技术有限公司 狭小缝隙直线度与平面度测量的辅助装置及测量方法
CN107462185A (zh) * 2017-08-23 2017-12-12 长春长光精密仪器集团有限公司 实现超大口径平面镜面形检测的装置
WO2018090347A1 (zh) * 2016-11-19 2018-05-24 弗埃斯工业技术（苏州）有限公司 一种用于笔记本主机上盖的平面度测量装置
CN109108096A (zh) * 2018-08-20 2019-01-01 山西太钢不锈钢股份有限公司 一种热轧平整机组激光板形监测方法及其系统

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62225904A (ja) * 1986-02-28 1987-10-03 ポラロイド　コ−ポレ−シヨン 透明物体表面と他表面との微小間隔の画像を形成する方法および装置
CN104567748A (zh) * 2013-10-14 2015-04-29 上海金艺检测技术有限公司 狭小缝隙直线度与平面度测量的辅助装置及测量方法
WO2018090347A1 (zh) * 2016-11-19 2018-05-24 弗埃斯工业技术（苏州）有限公司 一种用于笔记本主机上盖的平面度测量装置
CN107462185A (zh) * 2017-08-23 2017-12-12 长春长光精密仪器集团有限公司 实现超大口径平面镜面形检测的装置
CN107462185B (zh) * 2017-08-23 2019-10-01 长春长光精密仪器集团有限公司 实现超大口径平面镜面形检测的装置
CN109108096A (zh) * 2018-08-20 2019-01-01 山西太钢不锈钢股份有限公司 一种热轧平整机组激光板形监测方法及其系统

Also Published As

Publication number Publication date
JPS632324B2 (en]) 1988-01-18

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